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Fine processing of polymer surface by irradiating local atmospheric pressure plasma jets using helium source gas mixed with water vapor

Sho Yamamoto, Daisuke Morimatsu, Hiromitsu Nakamura, Akihisa Ogino, Masaaki Nagatsu, Futoshi Iwata. Fine processing of polymer surface by irradiating local atmospheric pressure plasma jets using helium source gas mixed with water vapor. In International Symposium on Micro-NanoMechatronics and Human Science, MHS 2017, Nagoya, Japan, December 3-6, 2017. pages 1-5, IEEE, 2017. [doi]

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