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Functional SU-8-PET composite microchip including Au microdot array fabricated by low temperature polymer bonding

R. Yamamoto, K. Sueyoshi, K. Otsuka. Functional SU-8-PET composite microchip including Au microdot array fabricated by low temperature polymer bonding. In 8th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2013, Suzhou, China, April 7-10, 2013. pages 418-421, IEEE, 2013. [doi]

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R. Yamamoto

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K. Sueyoshi

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K. Otsuka

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