R. Yamamoto, K. Sueyoshi, K. Otsuka. Functional SU-8-PET composite microchip including Au microdot array fabricated by low temperature polymer bonding. In 8th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2013, Suzhou, China, April 7-10, 2013. pages 418-421, IEEE, 2013. [doi]
Abstract is missing.