Toward Improvement and Evaluation of Reconstruction Capability of CapsNet-Based Wafer Map Defect Pattern Classifier - researchr publication authors

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Yuki Yamanaka, Masayuki Arai, Yoshikazu Nagamura, Satoshi Fukumoto. Toward Improvement and Evaluation of Reconstruction Capability of CapsNet-Based Wafer Map Defect Pattern Classifier. In IEEE International Test Conference in Asia, ITC-Asia 2023, Matsue, Japan, September 12-14, 2023. pages 1-6, IEEE, 2023. [doi]

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