Daisuke Yamane, Toshifumi Konishi, Teruaki Safu, Hiroshi Toshiyoshi, Masato Sone, Kazuya Masu, Katsuyuki Machida. A design of spring constant arranged for MEMS accelerometer by multi-layer metal technology. In 11th IEEE Annual International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2016, Sendai, Japan, April 17-20, 2016. pages 419-422, IEEE, 2016. [doi]
@inproceedings{YamaneKSTSMM16-0,
title = {A design of spring constant arranged for MEMS accelerometer by multi-layer metal technology},
author = {Daisuke Yamane and Toshifumi Konishi and Teruaki Safu and Hiroshi Toshiyoshi and Masato Sone and Kazuya Masu and Katsuyuki Machida},
year = {2016},
doi = {10.1109/NEMS.2016.7758281},
url = {https://doi.org/10.1109/NEMS.2016.7758281},
researchr = {https://researchr.org/publication/YamaneKSTSMM16-0},
cites = {0},
citedby = {0},
pages = {419-422},
booktitle = {11th IEEE Annual International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2016, Sendai, Japan, April 17-20, 2016},
publisher = {IEEE},
isbn = {978-1-5090-1947-2},
}