Daisuke Yamane, Toshifumi Konishi, Teruaki Safu, Hiroshi Toshiyoshi, Masato Sone, Kazuya Masu, Katsuyuki Machida. A design of spring constant arranged for MEMS accelerometer by multi-layer metal technology. In 11th IEEE Annual International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2016, Sendai, Japan, April 17-20, 2016. pages 419-422, IEEE, 2016. [doi]
Abstract is missing.