Local ablation by plasma blade using on-chip micro-electrode

Yoko Yamanishi, Hiroki Kuriki, Shinya Sakuma, Masaya Hagiwara, Tomohiro Kawahara, Fumihito Arai. Local ablation by plasma blade using on-chip micro-electrode. In International Symposium on Micro-NanoMechatronics and Human Science, MHS 2011, Nagoya, Japan, November 6-9, 2011. pages 113-115, IEEE, 2011. [doi]

Abstract

Abstract is missing.