Optimization-based litho machine scheduling with multiple reticles and setups - researchr publication authors

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Bing Yan, Hsin-Yuan Chen, Peter B. Luh, Simon Wang, Joey Chang. Optimization-based litho machine scheduling with multiple reticles and setups. In IEEE Conference on Automation Science and Engineering, CASE 2011, Trieste, Italy, Aug. 24-27, 2011. pages 114-119, IEEE, 2011. [doi]

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