Bing Yan, Hsin-Yuan Chen, Peter B. Luh, Simon Wang, Joey Chang. Optimization-based litho machine scheduling with multiple reticles and setups. In IEEE Conference on Automation Science and Engineering, CASE 2011, Trieste, Italy, Aug. 24-27, 2011. pages 114-119, IEEE, 2011. [doi]
@inproceedings{YanCLWC11,
title = {Optimization-based litho machine scheduling with multiple reticles and setups},
author = {Bing Yan and Hsin-Yuan Chen and Peter B. Luh and Simon Wang and Joey Chang},
year = {2011},
doi = {10.1109/CASE.2011.6042516},
url = {http://dx.doi.org/10.1109/CASE.2011.6042516},
researchr = {https://researchr.org/publication/YanCLWC11},
cites = {0},
citedby = {0},
pages = {114-119},
booktitle = {IEEE Conference on Automation Science and Engineering, CASE 2011, Trieste, Italy, Aug. 24-27, 2011},
publisher = {IEEE},
isbn = {978-1-4577-1730-7},
}