A new method for model based frugal OPC

Xiaolang Yan, Ye Chen, Zheng Shi, Yue Ma. A new method for model based frugal OPC. In Ting-Ao Tang, editor, Proceedings of the 2005 Conference on Asia South Pacific Design Automation, ASP-DAC 2005, Shanghai, China, January 18-21, 2005. pages 83-86, ACM Press, 2005. [doi]

@inproceedings{YanCSM05,
  title = {A new method for model based frugal OPC},
  author = {Xiaolang Yan and Ye Chen and Zheng Shi and Yue Ma},
  year = {2005},
  doi = {10.1145/1120725.1120751},
  url = {http://doi.acm.org/10.1145/1120725.1120751},
  tags = {rule-based},
  researchr = {https://researchr.org/publication/YanCSM05},
  cites = {0},
  citedby = {0},
  pages = {83-86},
  booktitle = {Proceedings of the 2005 Conference on Asia South Pacific Design Automation, ASP-DAC 2005, Shanghai, China, January 18-21, 2005},
  editor = {Ting-Ao Tang},
  publisher = {ACM Press},
  isbn = {0-7803-8737-6},
}