Jhih-Nan Yan, Yung-Chun Lee. Fabrication of metal embedded photo-mask for sub-micrometer scaled photolithography and patterning sapphire substrate. In 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012, Kyoto, Japan, March 5-8, 2012. pages 36-39, IEEE, 2012. [doi]
Abstract is missing.