A Temperature-Insensitive Resonant Pressure Micro Sensor Based on Silicon-on-Glass Vacuum Packaging

Pengcheng Yan, Yulan Lu, Chao Xiang, Junbo Wang, Deyong Chen, Jian Chen 0012. A Temperature-Insensitive Resonant Pressure Micro Sensor Based on Silicon-on-Glass Vacuum Packaging. Sensors, 19(18):3866, 2019. [doi]

Abstract

Abstract is missing.