Ruixuan Yan, Xianglei Wei, Chunhua He, Qiancheng Zhao, Zhenchuan Yang, Guizhen Yan. Research on the resonant frequency of MEMS gyroscopes under varying tuning voltage. In 10th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2015, Xi'an, China, April 7-11, 2015. pages 435-437, IEEE, 2015. [doi]
Abstract is missing.