A decoupled inversion-based iterative control approach to multi-axis precision positioning: 3-d nanopositioning example

Yan Yan, Haiming Wang, Qingze Zou. A decoupled inversion-based iterative control approach to multi-axis precision positioning: 3-d nanopositioning example. In American Control Conference, ACC 2010, Baltimore, Maryland, USA, June 30 - July 2, 2010. pages 1290-1295, IEEE, 2010. [doi]

Abstract

Abstract is missing.