A shape memory alloy thick film actuator array for narrow pitched planar tactile display device

H. Yanatori, T. Mineta, S. Takeuchi, K. Abe. A shape memory alloy thick film actuator array for narrow pitched planar tactile display device. In 11th IEEE Annual International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2016, Sendai, Japan, April 17-20, 2016. pages 251-254, IEEE, 2016. [doi]

Abstract

Abstract is missing.