High-performance Si photonics interposer featuring RF travelling-wave electrode (TWE) via Cu-BEOL

Yan Yang, Qing Fang, Mingbin Yu, Xiaoguang Tu, Junfeng Song, Rusli, Guo-Qiang Lo. High-performance Si photonics interposer featuring RF travelling-wave electrode (TWE) via Cu-BEOL. In Optical Fiber Communications Conference and Exhibition, OFC 2015, Los Angeles, CA, USA, March 22-26, 2015. pages 1-3, IEEE, 2015. [doi]

Abstract

Abstract is missing.