Ge Yang, James A. Gaines, Bradley J. Nelson. A Supervisory Wafer-Level 3D Microassembly System for Hybrid MEMS Fabrication. Journal of Intelligent and Robotic Systems, 37(1):43-68, 2003. [doi]
@article{YangGN03,
title = {A Supervisory Wafer-Level 3D Microassembly System for Hybrid MEMS Fabrication},
author = {Ge Yang and James A. Gaines and Bradley J. Nelson},
year = {2003},
doi = {10.1023/A:1023982907874},
url = {http://dx.doi.org/10.1023/A:1023982907874},
researchr = {https://researchr.org/publication/YangGN03},
cites = {0},
citedby = {0},
journal = {Journal of Intelligent and Robotic Systems},
volume = {37},
number = {1},
pages = {43-68},
}