Structural design and active disturbance rejection control of rigid-flexible coupling motion stage for nanopositioning

Zhijun Yang, Ruirui Huang, Sen Chen, Liyun Su, Ruiqi Li. Structural design and active disturbance rejection control of rigid-flexible coupling motion stage for nanopositioning. J. Franklin Institute, 360(3):2133-2158, February 2023. [doi]

Authors

Zhijun Yang

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Ruirui Huang

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Sen Chen

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Liyun Su

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Ruiqi Li

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