Zhijun Yang, Ruirui Huang, Sen Chen, Liyun Su, Ruiqi Li. Structural design and active disturbance rejection control of rigid-flexible coupling motion stage for nanopositioning. J. Franklin Institute, 360(3):2133-2158, February 2023. [doi]
@article{YangHCSL23,
title = {Structural design and active disturbance rejection control of rigid-flexible coupling motion stage for nanopositioning},
author = {Zhijun Yang and Ruirui Huang and Sen Chen and Liyun Su and Ruiqi Li},
year = {2023},
month = {February},
doi = {10.1016/j.jfranklin.2022.12.030},
url = {https://doi.org/10.1016/j.jfranklin.2022.12.030},
researchr = {https://researchr.org/publication/YangHCSL23},
cites = {0},
citedby = {0},
journal = {J. Franklin Institute},
volume = {360},
number = {3},
pages = {2133-2158},
}