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Efficient Approach to Scheduling of Transient Processes for Time-Constrained Single-Arm Cluster Tools With Parallel Chambers

FaJun Yang, Yan Qiao, Kaizhou Gao, Naiqi Wu, Yuting Zhu, Ian Ware Simon, Rong Su. Efficient Approach to Scheduling of Transient Processes for Time-Constrained Single-Arm Cluster Tools With Parallel Chambers. IEEE Transactions on Systems, Man, and Cybernetics, Part A, 50(10):3646-3657, 2020. [doi]

Authors

FaJun Yang

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Yan Qiao

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Kaizhou Gao

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Naiqi Wu

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Yuting Zhu

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Ian Ware Simon

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Rong Su

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