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Efficient Approach to Scheduling of Transient Processes for Time-Constrained Single-Arm Cluster Tools With Parallel Chambers

FaJun Yang, Yan Qiao, Kaizhou Gao, Naiqi Wu, Yuting Zhu, Ian Ware Simon, Rong Su. Efficient Approach to Scheduling of Transient Processes for Time-Constrained Single-Arm Cluster Tools With Parallel Chambers. IEEE Transactions on Systems, Man, and Cybernetics, Part A, 50(10):3646-3657, 2020. [doi]

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