PPA and Scaling Potential of Backside Power Options in N2 and A14 Nanosheet Technology

S. Yang, Pieter Schuddinck, Marie Garcia Bardon, Yang Xiang, Anabela Veloso, B. T. Chan, Gioele Mirabelli, Gaspard Hiblot, Geert Hellings, Julien Ryckaert. PPA and Scaling Potential of Backside Power Options in N2 and A14 Nanosheet Technology. In 2023 IEEE Symposium on VLSI Technology and Circuits (VLSI Technology and Circuits), Kyoto, Japan, June 11-16, 2023. pages 1-2, IEEE, 2023. [doi]

@inproceedings{YangSBXVCMHHR23,
  title = {PPA and Scaling Potential of Backside Power Options in N2 and A14 Nanosheet Technology},
  author = {S. Yang and Pieter Schuddinck and Marie Garcia Bardon and Yang Xiang and Anabela Veloso and B. T. Chan and Gioele Mirabelli and Gaspard Hiblot and Geert Hellings and Julien Ryckaert},
  year = {2023},
  doi = {10.23919/VLSITechnologyandCir57934.2023.10185302},
  url = {https://doi.org/10.23919/VLSITechnologyandCir57934.2023.10185302},
  researchr = {https://researchr.org/publication/YangSBXVCMHHR23},
  cites = {0},
  citedby = {0},
  pages = {1-2},
  booktitle = {2023 IEEE Symposium on VLSI Technology and Circuits (VLSI Technology and Circuits), Kyoto, Japan, June 11-16, 2023},
  publisher = {IEEE},
  isbn = {978-4-86348-806-9},
}