Statically Stable Charge Sensing Method for Precise Displacement Estimation of Piezoelectric Stack-Based Nanopositioning

Chen Yang 0014, Nicolas Verbeek, Fangzhou Xia 0001, Yi Wang, Kamal Youcef-Toumi. Statically Stable Charge Sensing Method for Precise Displacement Estimation of Piezoelectric Stack-Based Nanopositioning. IEEE Transactions on Industrial Electronics, 68(9):8550-8560, 2021. [doi]

Abstract

Abstract is missing.