The coupling error analysis of the decoupled silicon Micro-Gyroscope

Bo Yang, Shourong Wang, Hongsheng Li, Libin Huang, Kunyu Li, Yong Yin. The coupling error analysis of the decoupled silicon Micro-Gyroscope. In 5th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010, Xiamen, China, January 20-23, 2010. pages 356-361, IEEE, 2010. [doi]

@inproceedings{YangWLHLY10,
  title = {The coupling error analysis of the decoupled silicon Micro-Gyroscope},
  author = {Bo Yang and Shourong Wang and Hongsheng Li and Libin Huang and Kunyu Li and Yong Yin},
  year = {2010},
  doi = {10.1109/NEMS.2010.5592238},
  url = {http://dx.doi.org/10.1109/NEMS.2010.5592238},
  researchr = {https://researchr.org/publication/YangWLHLY10},
  cites = {0},
  citedby = {0},
  pages = {356-361},
  booktitle = {5th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010, Xiamen, China, January 20-23, 2010},
  publisher = {IEEE},
}