The coupling error analysis of the decoupled silicon Micro-Gyroscope

Bo Yang, Shourong Wang, Hongsheng Li, Libin Huang, Kunyu Li, Yong Yin. The coupling error analysis of the decoupled silicon Micro-Gyroscope. In 5th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010, Xiamen, China, January 20-23, 2010. pages 356-361, IEEE, 2010. [doi]

Abstract

Abstract is missing.