Polynomial approach to optimal one-wafer cyclic scheduling of treelike hybrid multi-cluster tools via Petri nets

FaJun Yang, Naiqi Wu, Yan Qiao, Rong Su. Polynomial approach to optimal one-wafer cyclic scheduling of treelike hybrid multi-cluster tools via Petri nets. IEEE CAA J. Autom. Sinica, 5(1):270-280, 2018. [doi]

Abstract

Abstract is missing.