FaJun Yang, Naiqi Wu, Yan Qiao, MengChu Zhou. Optimal scheduling of single-arm multi-cluster tools with two-space buffering modules. In 2014 IEEE International Conference on Automation Science and Engineering, CASE 2014, New Taipei, Taiwan, August 18-22, 2014. pages 75-80, IEEE, 2014. [doi]
Abstract is missing.