FaJun Yang, Naiqi Wu, Yan Qiao, MengChu Zhou. Efficient and optimal scheduling of time-constrained hybrid multi-cluster tools in semiconductor industry. In 13th IEEE International Conference on Networking, Sensing, and Control, ICNSC 2016, Mexico City, Mexico, April 28-30, 2016. pages 1-6, IEEE, 2016. [doi]
Abstract is missing.