Growth Characteristics of Calcium Silicides Films from the Deposited Ca Films at the Different Sputtering Ar Pressure

Yinye Yang, Quan Xie. Growth Characteristics of Calcium Silicides Films from the Deposited Ca Films at the Different Sputtering Ar Pressure. In 2008 International Symposium on Computer Science and Computational Technology, ISCSCT 2008, 20-22 December 2008, Shanghai, China, 2 Volumes. pages 484-487, IEEE Computer Society, 2008. [doi]

Abstract

Abstract is missing.