Jing Yang 0014, Yi Xu, Hai-Jun Rong, Shaoyi Du, Hongmei Zhang. A Method for Wafer Defect Detection Using Spatial Feature Points Guided Affine Iterative Closest Point Algorithm. IEEE Access, 8:79056-79068, 2020. [doi]
@article{YangXRDZ20,
title = {A Method for Wafer Defect Detection Using Spatial Feature Points Guided Affine Iterative Closest Point Algorithm},
author = {Jing Yang 0014 and Yi Xu and Hai-Jun Rong and Shaoyi Du and Hongmei Zhang},
year = {2020},
doi = {10.1109/ACCESS.2020.2990535},
url = {https://doi.org/10.1109/ACCESS.2020.2990535},
researchr = {https://researchr.org/publication/YangXRDZ20},
cites = {0},
citedby = {0},
journal = {IEEE Access},
volume = {8},
pages = {79056-79068},
}