A Method for Wafer Defect Detection Using Spatial Feature Points Guided Affine Iterative Closest Point Algorithm

Jing Yang 0014, Yi Xu, Hai-Jun Rong, Shaoyi Du, Hongmei Zhang. A Method for Wafer Defect Detection Using Spatial Feature Points Guided Affine Iterative Closest Point Algorithm. IEEE Access, 8:79056-79068, 2020. [doi]

Abstract

Abstract is missing.