Nano-mechanical electro-thermal probe array used for high-density storage based on NEMS technology

Zunxian Yang, Ying Yu, Xinxin Li, Haifei Bao. Nano-mechanical electro-thermal probe array used for high-density storage based on NEMS technology. Microelectronics Reliability, 46(5-6):805-810, 2006. [doi]

Abstract

Abstract is missing.