High-quality and large-grain epi-like Si film by NiSi2-seed initiated lateral epitaxial crystallization (SILEC)

Yuancheng Yang, Baotong Zhang, Xiaoqiao Dong, Xiaokang Li, Shuang Sun, Qifeng Cai, Ran Bi, Xiaoyan Xu, Ming Li, Ru Huang. High-quality and large-grain epi-like Si film by NiSi2-seed initiated lateral epitaxial crystallization (SILEC). Science in China Series F: Information Sciences, 63(12), 2020. [doi]

Abstract

Abstract is missing.