Design, Fabrication, and Test of 4H-SiC Accelerometer

Yu Yang, You-Zhao, Lukang Wang, Yabing Wang, Yulong Zhao. Design, Fabrication, and Test of 4H-SiC Accelerometer. In 2023 IEEE SENSORS, Vienna, Austria, October 29 - Nov. 1, 2023. pages 1-4, IEEE, 2023. [doi]

@inproceedings{YangZWWZ23,
  title = {Design, Fabrication, and Test of 4H-SiC Accelerometer},
  author = {Yu Yang and You-Zhao and Lukang Wang and Yabing Wang and Yulong Zhao},
  year = {2023},
  doi = {10.1109/SENSORS56945.2023.10324947},
  url = {https://doi.org/10.1109/SENSORS56945.2023.10324947},
  researchr = {https://researchr.org/publication/YangZWWZ23},
  cites = {0},
  citedby = {0},
  pages = {1-4},
  booktitle = {2023 IEEE SENSORS, Vienna, Austria, October 29 - Nov. 1, 2023},
  publisher = {IEEE},
  isbn = {979-8-3503-0387-2},
}