Design, Fabrication, and Test of 4H-SiC Accelerometer

Yu Yang, You-Zhao, Lukang Wang, Yabing Wang, Yulong Zhao. Design, Fabrication, and Test of 4H-SiC Accelerometer. In 2023 IEEE SENSORS, Vienna, Austria, October 29 - Nov. 1, 2023. pages 1-4, IEEE, 2023. [doi]

Abstract

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