Application of laser deprocessing technique in PFA on chemical over-etched on bond-pad issue

H. H. Yap, P. K. Tan, L. Zhu, H. Feng, Y. Z. Zhao, R. He, H. Tan, B. Liu, Y. M. Huang, D. D. Wang, J. Lam, Z. H. Mai. Application of laser deprocessing technique in PFA on chemical over-etched on bond-pad issue. Microelectronics Reliability, 64:357-361, 2016. [doi]

Abstract

Abstract is missing.