Statistical modeling and simulation of threshold variation under dopant fluctuations and line-edge roughness

Yun Ye, Frank Liu, Sani R. Nassif, Yu Cao. Statistical modeling and simulation of threshold variation under dopant fluctuations and line-edge roughness. In Limor Fix, editor, Proceedings of the 45th Design Automation Conference, DAC 2008, Anaheim, CA, USA, June 8-13, 2008. pages 900-905, ACM, 2008. [doi]

Abstract

Abstract is missing.