5 V Compatible Two-Axis PZT Driven MEMS Scanning Mirror with Mechanical Leverage Structure for Miniature LiDAR Application

Liangchen Ye, Gaofei Zhang, Zheng You. 5 V Compatible Two-Axis PZT Driven MEMS Scanning Mirror with Mechanical Leverage Structure for Miniature LiDAR Application. Sensors, 17(3):521, 2017. [doi]

Abstract

Abstract is missing.