A Flexible Cluster Tool Simulation Framework with Wafer Batch Dispatching Time Recommendation - researchr publication authors

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Hsin-Ping Yen, Shiuan-Hau Huang, Yan-Hsiu Liu, Kuang-Hsien Tseng, Ji-Fu Kung, Yi-Ting Li, Yung-Chih Chen, Chun-Yao Wang. A Flexible Cluster Tool Simulation Framework with Wafer Batch Dispatching Time Recommendation. In 24th International Symposium on Quality Electronic Design, ISQED 2023, San Francisco, CA, USA, April 5-7, 2023. pages 1-8, IEEE, 2023. [doi]

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