Zirconium Oxide Dielectric Layer: Preparation and Characterization with Various Volumes of Acetylacetone

Chih-Feng Yen, Shen-Hao Tsao, Yu-Ya Huang. Zirconium Oxide Dielectric Layer: Preparation and Characterization with Various Volumes of Acetylacetone. In 5th IEEE International Conference on Knowledge Innovation and Invention, ICKII 2022, Hualien, Taiwan, July 22-24, 2022. pages 230-233, IEEE, 2022. [doi]

Abstract

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