Integrated Piezoelectric AlN Thin Film with SU-8/PDMS Supporting Layer for Flexible Sensor Array

Hong Goo Yeo, Joontaek Jung, Minkyung Sim, Jae Eun Jang, Hongsoo Choi. Integrated Piezoelectric AlN Thin Film with SU-8/PDMS Supporting Layer for Flexible Sensor Array. Sensors, 20(1):315, 2020. [doi]

Abstract

Abstract is missing.