Seong Jin Yim, Doo Yong Lee. Scheduling cluster tools in wafer fabrication using candidate list and simulated annealing. In Proceedings of the IEEE International Conference on Systems, Man and Cybernetics, SMC 1998, Hyatt Regency La Jolla, San Diego, California, USA, October 11-14,1998. pages 2291-2296, IEEE, 1998. [doi]
Abstract is missing.