Yonggang Yin, Danyang Ren, Yuqi Wang, Da Gao, Junhui Shi. A MEMS Capacitive Resonator as an Acoustic Sensor for Photoacoustic Spectroscopy. In 2023 IEEE SENSORS, Vienna, Austria, October 29 - Nov. 1, 2023. pages 1-4, IEEE, 2023. [doi]
Abstract is missing.