Tan Yin, Yunna Sun, Yan Wang, Guifu Ding, Mingyu Zhang. Study on Complementary Auxiliary Cathode Method for Improving the Microstructure Uniformity of Electroplated Thick Metal Film. In 18th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2023, Jeju Island, Korea, Republic of, May 14-17, 2023. pages 78-81, IEEE, 2023. [doi]
Abstract is missing.