Yong Yin, Shourong Wang, Cunchao Wang, Bo Yang. Structure-decoupled dual-mass MEMS gyroscope with self-adaptive closed-loop detection. In 5th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010, Xiamen, China, January 20-23, 2010. pages 624-627, IEEE, 2010. [doi]
Abstract is missing.