A TIA-based readout circuit with temperature compensation for MEMS capacitive gyroscope

Tao Yin, Huanming Wu, Qisong Wu, Haigang Yang, J. Jiao. A TIA-based readout circuit with temperature compensation for MEMS capacitive gyroscope. In 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2011, Kaohsiung, Taiwan, February 20-23, 2011. pages 401-405, IEEE, 2011. [doi]

Authors

Tao Yin

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Huanming Wu

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Qisong Wu

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Haigang Yang

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J. Jiao

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