Device Design Guideline of 5-nm-Node FinFETs and Nanosheet FETs for Analog/RF Applications

Jun-Sik Yoon, Rock-Hyun Baek. Device Design Guideline of 5-nm-Node FinFETs and Nanosheet FETs for Analog/RF Applications. IEEE Access, 8:189395-189403, 2020. [doi]

Abstract

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