Punch-Through-Stopper Free Nanosheet FETs With Crescent Inner-Spacer and Isolated Source/Drain

Jun-Sik Yoon, Jinsu Jeong, Seunghwan Lee, Rock-Hyun Baek. Punch-Through-Stopper Free Nanosheet FETs With Crescent Inner-Spacer and Isolated Source/Drain. IEEE Access, 7:38593-38596, 2019. [doi]

Abstract

Abstract is missing.