Bottom Oxide Bulk FinFETs Without Punch-Through-Stopper for Extending Toward 5-nm Node

Jun-Sik Yoon, Jinsu Jeong, Seunghwan Lee, Rock-Hyun Baek. Bottom Oxide Bulk FinFETs Without Punch-Through-Stopper for Extending Toward 5-nm Node. IEEE Access, 7:75762-75767, 2019. [doi]

Abstract

Abstract is missing.