Issues and Key Technologies for Next Generation 3D NAND

Chiweon Yoon, Hyunggon Kim, Seon-Kyoo Lee, Jinyub Lee, Jai Hyuk Song. Issues and Key Technologies for Next Generation 3D NAND. In International Conference on Electronics, Information, and Communication, ICEIC 2021, Jeju, South Korea, January 31 - February 3, 2021. pages 1-4, IEEE, 2021. [doi]

Abstract

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